EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF THE LIGHT SOURCE

The invention relates to an EUV (extreme ultraviolet) illumination system with at least one EUV light source (3) ; with an aperture stop and sensor arrangement (1) for the measurement of intensity fluctuations and/or position changes of the EUV light source (3), in particular in the range of the eff...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHOLZ AXEL, MAUL MANFRED, BOSSELMANN PHILIPP, WEISS MARKUS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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