A METHOD AND A SYSTEM FOR ESTABLISHING AN INSPECTION RECIPE

A METHOD AND A SYSTEM FOR ESTABLISHING AN INSPECTION RECIPE

A method and a system for establishing a wafer testing recipe are disclosed. According to the present invention the system is comprised of a camera for acquiring images of a number of dice from a produced wafer; and a dedicated software that operative for using at least part of the images and compos...

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1. Verfasser: REGENSBURGER MENA
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Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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creator REGENSBURGER MENA
description A method and a system for establishing a wafer testing recipe are disclosed. According to the present invention the system is comprised of a camera for acquiring images of a number of dice from a produced wafer; and a dedicated software that operative for using at least part of the images and composes a reference-image to be used as testing reference of a typical die image; defining on the reference-image single and/or repeatable elements of a die pattern as a "zone of interest; determining the Detection-Policy for each of the zone of interest or for a group of similar zones of interest and determining the algorithm that will be used by each of the Detection-Policy; determining the parameters of each of the Detection-Policy's algorithms; determining the Reporting-policy by defining a set of specific names of defect classes that could be used during inspection of a specific lot of wafers; determining the Inspection-policy defining behavior of inspection system as a set of pre-defined logical rules; and creating a "wafer testing recipe" by integrating of the testing reference of a typical die image, the defined zones of interest, the determined Detection-Policies, the parameters of the determined Detection-Policies' algorithms, the determined Reporting-Policies and the determined Inspection-Policies.
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According to the present invention the system is comprised of a camera for acquiring images of a number of dice from a produced wafer; and a dedicated software that operative for using at least part of the images and composes a reference-image to be used as testing reference of a typical die image; defining on the reference-image single and/or repeatable elements of a die pattern as a "zone of interest; determining the Detection-Policy for each of the zone of interest or for a group of similar zones of interest and determining the algorithm that will be used by each of the Detection-Policy; determining the parameters of each of the Detection-Policy's algorithms; determining the Reporting-policy by defining a set of specific names of defect classes that could be used during inspection of a specific lot of wafers; determining the Inspection-policy defining behavior of inspection system as a set of pre-defined logical rules; and creating a "wafer testing recipe" by integrating of the testing reference of a typical die image, the defined zones of interest, the determined Detection-Policies, the parameters of the determined Detection-Policies' algorithms, the determined Reporting-Policies and the determined Inspection-Policies.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20080714&amp;DB=EPODOC&amp;CC=KR&amp;NR=20080065584A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20080714&amp;DB=EPODOC&amp;CC=KR&amp;NR=20080065584A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>REGENSBURGER MENA</creatorcontrib><title>A METHOD AND A SYSTEM FOR ESTABLISHING AN INSPECTION RECIPE</title><description>A method and a system for establishing a wafer testing recipe are disclosed. 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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title A METHOD AND A SYSTEM FOR ESTABLISHING AN INSPECTION RECIPE
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