SEMICONDUCTOR MANUFACTURING APPARATUS AND HEATER THEREOF

An apparatus for manufacturing a semiconductor and a heater of the same are provided to prevent the arcing and fail at a position adjacent to a lower electrode and a ground line by using an insulator having a sub-insulating unit. A heater block(161) has a heating body(161a) and a lower electrode(120...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIM, KYOUNG MAN, PARK, YOO CHOON, YANG, YUN SIK, KIM, HAG PIL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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