APPARATUS AND METHOD FOR SEPARATING AND TRANSPORTING SUBSTRATES

The invention particularly relates to separating and transporting a disk-shaped substrate (102; 202), such as a solar wafer. The invention is characterized in that separation steps are performed within a fluid and that adhesive forces develop between a gripper (108; 208) and the substrate to be sepa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KALTENBACH KONRAD, HERTER RICHARD
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING WORKING CEMENT, CLAY, OR STONE WORKING STONE OR STONE-LIKE MATERIALS
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