PROCESS FOR PRODUCING RADIATION-SENSITIVE RESIN COMPOSITION

PROCESS FOR PRODUCING RADIATION-SENSITIVE RESIN COMPOSITION

A process for producing a radiation-sensitive resin composition, comprising the step of providing a filter apparatus equipped with a filter composed of a polyamide resin filter and a polyethylene resin filter connected in series and circulating a precursor composition for radiation-sensitive resin c...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ITOU KOUJI, YOSHIDA KOUICHIROU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A process for producing a radiation-sensitive resin composition, comprising the step of providing a filter apparatus equipped with a filter composed of a polyamide resin filter and a polyethylene resin filter connected in series and circulating a precursor composition for radiation-sensitive resin composition in the filter apparatus so that the precursor composition is passed through the filter two or more times to thereby effect filtration with the result that foreign matter is removed from the precursor composition.