METHOD FOR RECYCLING CRYSTAL SENSOR OF EVAPORATION APPARATUS

A method for recycling a crystal sensor of an evaporation device is provided to reduce a manufacturing cost by removing a thin film accumulated in a contact electrode using etch liquid. A crystal sensor(52a) of an evaporation device to monitor deposition materials deposited on a substrate for a time...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, OCK HEE, JEON, AE KYUNG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!