RESONANT SCANNING MIRROR

A resonant scanning mirror is provided to embody rotation without distortion by removing vibration while using a synchronous scanning mirror. An illumination system(IL) conditions a radiation beam received from a radiation source(SO) operating at a first frequency. A patterning device(PD) patterns t...

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1. Verfasser:	DEL PUERTO SANTIAGO E
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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