PACKAGE OF WAFER LEVEL SEMICONDUCTOR CHIP AND METHOD OF MANUFACTURING THE SAME

A method for manufacturing a semiconductor chip package of a wafer level is provided to prevent damage of a conductive pattern in a post process by forming external connection terminals on a rear surface of a wafer and covering a front surface with an encapsulation layer. A conductive pattern(102) i...

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Hauptverfasser: KIM, HEUI SEOG, HAN, MAN HEE, KIM, SANG JUN, SIN, WHA SU, KIM, JAE HONG, KIM, GOON WOO
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creator KIM, HEUI SEOG
HAN, MAN HEE
KIM, SANG JUN
SIN, WHA SU
KIM, JAE HONG
KIM, GOON WOO
description A method for manufacturing a semiconductor chip package of a wafer level is provided to prevent damage of a conductive pattern in a post process by forming external connection terminals on a rear surface of a wafer and covering a front surface with an encapsulation layer. A conductive pattern(102) is formed a front surface of a wafer(100), and the front surface of the wafer is covered by an encapsulation layer(106). Chip plugs(104) are electrically connected to the conductive pattern, and are embedded in a rear surface of the wafer. External connection terminals are formed on the rear surface of the wafer, and are electrically connected to the chip plugs. The uppermost conductive pattern is directly connected to the chip plugs. The encapsulation layer is made of epoxy molding compound.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title PACKAGE OF WAFER LEVEL SEMICONDUCTOR CHIP AND METHOD OF MANUFACTURING THE SAME
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