UV LAMP AND UV IRRADIATION UNIT

This invention is related to an ultraviolet lamp, particularly to an excimer lamp. Specifically disclosed is an excimer lamp (1) comprising a discharge tube (2) having a double-tube structure composed of an outer tube (3) made of a quartz glass and an inner tube (4) made of a quartz glass, a first e...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HATASE KAZUYA, KANAMORI YOSHINORI
Format: Patent
Sprache:eng
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