SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME DEVICE
A semiconductor device and a manufacturing method thereof are provided to prevent the increase of leakage current due to the field inversion by using a field inversion preventing layer. A plurality of active regions are formed on a semiconductor substrate. A field region(140) made of field oxide is...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A semiconductor device and a manufacturing method thereof are provided to prevent the increase of leakage current due to the field inversion by using a field inversion preventing layer. A plurality of active regions are formed on a semiconductor substrate. A field region(140) made of field oxide is formed on the resultant structure to insulate the active regions from each other. A field inversion preventing layer(148) is formed on a portion of the field region. A field gate poly(150) is formed on the active regions and the field inversion preventing layer. The field inversion preventing layer is formed like a rectangle type structure or an oval type structure. |
---|