MICROWAVE RESONATOR AND METHOD OF OPERATING MICROWAVE RESONATOR

The invention relates to an even- numbered polygonal resonator wherein a high mode microwave mode is formed and a large volume part of the resonator volume with homogenous field distribution is provided for even thermal processing of workpieces. A pair of coupling structures are disposed along the o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FEHER LAMBERT, SEITZ THOMAS, FLACH ANDREAS, NUSS VOLKER
Format: Patent
Sprache:eng
Schlagworte:
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