METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD

The invention concerns a method for producing a semi-conducting device comprising at least a layer doped with a doping agent and a layer of another type deposited on said doped layer in a single reaction chamber. The deposition steps of these layers are separated by an operation for avoiding the con...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: POPPELLER MARKUS, BALLUTAUD JULIETTE, HOWLING ALAN, KROLL ULRICH, SCHMITT JACQUES, BUCHER CEDRIC, HOLLENSTEIN CHRISTOPH
Format: Patent
Sprache:eng
Schlagworte:
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