APPARATUS FOR SUPPORTING SUBSTRATE PREVENTING IMPURITIES FROM INCOMING INTO STEP PORTION BETWEEN STAGE AND CHANNEL BY FORMING COVERS

PURPOSE: An apparatus for supporting a substrate is provided to prevent a loss of channel and improve stability of the stage. CONSTITUTION: A base(210) having a channel(212) is extended in the direction of X-axis, the channel is provided with a step portion(214) formed in the horizontal direction. A...

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Bibliographische Detailangaben

Hauptverfasser:	KANG, HO SEONG, NHO, HYUN JUNG, KO, YOUNG MIN, CHUN, TAE SEUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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