conductive ceramic electrode and including a electrostatic chuck

PURPOSE: A conductive ceramic electrode is provided to obtain uniform and strong absorption power by making a conductive ceramic electrode formed of a conductive ceramic material including titanium such that the conductive ceramic electrode is of a plate type to generate a uniform electric field. CO...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOI, YEONG MIN, LEE, JAE DO, JANG, HYEON JU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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