ANALYSIS SAMPLE FOR A TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF MAKING THE SAME
PURPOSE: A transmission electron microscope analytic sample and a method of manufacturing the analytic sample are provided, to give a thin analytic sample and not require reworking even when the sample is broken. CONSTITUTION: The transmission electron microscope analytic sample(100) is used in the...
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| creator | KIM, GYEONG GUK LEE, EUN GU |
| description | PURPOSE: A transmission electron microscope analytic sample and a method of manufacturing the analytic sample are provided, to give a thin analytic sample and not require reworking even when the sample is broken. CONSTITUTION: The transmission electron microscope analytic sample(100) is used in the structure analysis by the transmission electron microscope. The analytic sample includes analytic zones(106) which electrons are transmitted, and the analytic zones have different thickness individually according to the analytic zones. The analytic zones(106) have a cascaded structure wherein the thickness is changed discontinuously. The analytic zones(106) have an inclined structure wherein the thickness is changed continuously.
투과전자현미경 분석시료 및 그 제조방법을 제공한다. 이 분석시료는 전자가 투과되는 분석영역을 포함하고, 분석영역은 영역별로 다른 두께를 갖는다. 영역별 두께가 다른 분석영역을 만드는 방법은, 시료를 소정의 크기로 절단하고, 절단된 시료의 측면을 양 방향에서 연마한다. 연마된 시료를 그리드에 접착한다. 이어서, 접착된 시료의 상부면에 집속된 이온 빔(FIB)을 반복적으로 조사하여 시료의 양쪽을 미세식각한다. 이 때, 미세식각된 분석영역의 적어도 한면은 계단형 구조로 형성하여 분석영역의 두께가 불연속적으로 변하도록 할 수 있다. 이와 달리 미세식각시 시료를 일정각도 회전시켜 분석영역의 두께가 연속적으로 변하도록 형성할 수 있다. |
| format | Patent |
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투과전자현미경 분석시료 및 그 제조방법을 제공한다. 이 분석시료는 전자가 투과되는 분석영역을 포함하고, 분석영역은 영역별로 다른 두께를 갖는다. 영역별 두께가 다른 분석영역을 만드는 방법은, 시료를 소정의 크기로 절단하고, 절단된 시료의 측면을 양 방향에서 연마한다. 연마된 시료를 그리드에 접착한다. 이어서, 접착된 시료의 상부면에 집속된 이온 빔(FIB)을 반복적으로 조사하여 시료의 양쪽을 미세식각한다. 이 때, 미세식각된 분석영역의 적어도 한면은 계단형 구조로 형성하여 분석영역의 두께가 불연속적으로 변하도록 할 수 있다. 이와 달리 미세식각시 시료를 일정각도 회전시켜 분석영역의 두께가 연속적으로 변하도록 형성할 수 있다.</description><edition>7</edition><language>eng ; kor</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030303&DB=EPODOC&CC=KR&NR=20030016910A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030303&DB=EPODOC&CC=KR&NR=20030016910A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KIM, GYEONG GUK</creatorcontrib><creatorcontrib>LEE, EUN GU</creatorcontrib><title>ANALYSIS SAMPLE FOR A TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF MAKING THE SAME</title><description>PURPOSE: A transmission electron microscope analytic sample and a method of manufacturing the analytic sample are provided, to give a thin analytic sample and not require reworking even when the sample is broken. CONSTITUTION: The transmission electron microscope analytic sample(100) is used in the structure analysis by the transmission electron microscope. The analytic sample includes analytic zones(106) which electrons are transmitted, and the analytic zones have different thickness individually according to the analytic zones. The analytic zones(106) have a cascaded structure wherein the thickness is changed discontinuously. The analytic zones(106) have an inclined structure wherein the thickness is changed continuously.
투과전자현미경 분석시료 및 그 제조방법을 제공한다. 이 분석시료는 전자가 투과되는 분석영역을 포함하고, 분석영역은 영역별로 다른 두께를 갖는다. 영역별 두께가 다른 분석영역을 만드는 방법은, 시료를 소정의 크기로 절단하고, 절단된 시료의 측면을 양 방향에서 연마한다. 연마된 시료를 그리드에 접착한다. 이어서, 접착된 시료의 상부면에 집속된 이온 빔(FIB)을 반복적으로 조사하여 시료의 양쪽을 미세식각한다. 이 때, 미세식각된 분석영역의 적어도 한면은 계단형 구조로 형성하여 분석영역의 두께가 불연속적으로 변하도록 할 수 있다. 이와 달리 미세식각시 시료를 일정각도 회전시켜 분석영역의 두께가 연속적으로 변하도록 형성할 수 있다.</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2003</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLsKwkAQANNYiPoPC9bCxYBguVz2vCP3CLfbpApBzko0EP8fFfwAq5limHUlGNEP7BgYQ-8JTMqAIBkjB8fsUgTypCV_JDidE-vUE2BsIZDY1EIyELBz8QJi6buhbbW6Tfel7H7cVHtDou2hzM-xLPN0LY_yGrt8VKpRqj6da4XNf9Ub3Gowsg</recordid><startdate>20030303</startdate><enddate>20030303</enddate><creator>KIM, GYEONG GUK</creator><creator>LEE, EUN GU</creator><scope>EVB</scope></search><sort><creationdate>20030303</creationdate><title>ANALYSIS SAMPLE FOR A TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF MAKING THE SAME</title><author>KIM, GYEONG GUK ; LEE, EUN GU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20030016910A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2003</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KIM, GYEONG GUK</creatorcontrib><creatorcontrib>LEE, EUN GU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KIM, GYEONG GUK</au><au>LEE, EUN GU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ANALYSIS SAMPLE FOR A TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF MAKING THE SAME</title><date>2003-03-03</date><risdate>2003</risdate><abstract>PURPOSE: A transmission electron microscope analytic sample and a method of manufacturing the analytic sample are provided, to give a thin analytic sample and not require reworking even when the sample is broken. CONSTITUTION: The transmission electron microscope analytic sample(100) is used in the structure analysis by the transmission electron microscope. The analytic sample includes analytic zones(106) which electrons are transmitted, and the analytic zones have different thickness individually according to the analytic zones. The analytic zones(106) have a cascaded structure wherein the thickness is changed discontinuously. The analytic zones(106) have an inclined structure wherein the thickness is changed continuously.
투과전자현미경 분석시료 및 그 제조방법을 제공한다. 이 분석시료는 전자가 투과되는 분석영역을 포함하고, 분석영역은 영역별로 다른 두께를 갖는다. 영역별 두께가 다른 분석영역을 만드는 방법은, 시료를 소정의 크기로 절단하고, 절단된 시료의 측면을 양 방향에서 연마한다. 연마된 시료를 그리드에 접착한다. 이어서, 접착된 시료의 상부면에 집속된 이온 빔(FIB)을 반복적으로 조사하여 시료의 양쪽을 미세식각한다. 이 때, 미세식각된 분석영역의 적어도 한면은 계단형 구조로 형성하여 분석영역의 두께가 불연속적으로 변하도록 할 수 있다. 이와 달리 미세식각시 시료를 일정각도 회전시켜 분석영역의 두께가 연속적으로 변하도록 형성할 수 있다.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | ANALYSIS SAMPLE FOR A TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF MAKING THE SAME |
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