MODULAR INJECTOR AND EXHAUST ASSEMBLY

PURPOSE: An injector and exhaust assembly is provided to promote uniform distribution of gas by including at least two injectors for forming at least one exhaust channel between the injector and an exhaust assembly. CONSTITUTION: At least two injectors are positioned adjacent to each other and space...

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Bibliographische Detailangaben
Hauptverfasser:	DEDONTNEY JAY BRIAN, KURITA SAMUEL, MATTIESEN RICHARD
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: An injector and exhaust assembly is provided to promote uniform distribution of gas by including at least two injectors for forming at least one exhaust channel between the injector and an exhaust assembly. CONSTITUTION: At least two injectors are positioned adjacent to each other and spaced apart to form at least one exhaust channel between therebetween. A mounting plate for securing the at least two injectors. Each of the at least two injectors is individually mounted to or removed from the mounting plate. The mounting plate is provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. The exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors. 기판에 가스를 이송하기 위한 인젝터 및 배기 어셈블리가 제공된다. 인젝터와 배기 어셈블리는 사이에 하나 또는 그 이상의 배기 채널을 형성하기 위하여 서로 인접하게 이격되어 배치된 둘 또는 그 이상의 인젝터를 포함하고, 그리고 둘 또는 그 이상의 인젝터를 장착하기 위한 장착판을 포함하는데, 상기 둘 또는 그 이상의 각각의 인젝터는 개별적으로 장착판에 장착되거나 장착판으로부터 제거되고, 그리고 상기 장착판은 하나 또는 그 이상의 배기 채널과 유체 소통되는 하나 또는 그 이상의 배기 슬롯이 제공된다. 배기 어셈블리는 인젝터로부터 배기 가스를 제거하기 위하여 장착판에 결합된다.