METHOD FOR FORMING POLY PLUG OF THIN FILM TRANSISTOR

PURPOSE: A method for forming a poly plug of a thin film transistor is provided to enhance reliability of the thin film transistor by reducing a step difference without a loss of a poly plug. CONSTITUTION: An interlayer dielectric(32) is deposited on a substrate(31). A contact hole is formed by etch...

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Bibliographische Detailangaben

Hauptverfasser:	LEE, JEONG UNG, CHOI, YUN JE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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