APERTURE DEVICE OF OPTICAL APPARATUS

PURPOSE: An aperture device of an optical apparatus is provided which prevents decrease of the resolution by preventing coulomb interaction of electron beams passing through beam apertures of a beam passing part even if a beam current is increased. CONSTITUTION: An aperture device of an optical appa...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHOI, BO GYEONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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