WAFER BOAT

PURPOSE: A wafer boat is provided to increase number of wafer loaded at a time by optimizing an interval of wafer slot pitch of the wafer boat. CONSTITUTION: A wafer boat(50) mounted on a low pressure chemical vapor deposition equipment comprises a top plate, a thermo-chamber and a number of support...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	JUNG, DONG OK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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