DEVICE FOR INSPECTING FOREIGN MATTER AND FAULT

PURPOSE: A device is provided to quickly investigate the causes of abnormality by measuring information on size of the detected object at real time and controlling only the detected object of specific size using the information on size. CONSTITUTION: First, a light from an illumination source(201) i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WATANABE GENJI, NOGUCHI MINORU, NAKAMURA HISATO, NISHIYAMA HIDETOSHI, OSHIMA YOSHIMASA, WATANABE TETSUYA, JINGU TAKAHIRO, SAIKI GEIKI, INOUE HIROKO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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