METHOD FOR MANUFACTURING ALIGNMENT KEY OF SEMICONDUCTOR DEVICE

PURPOSE: A method for manufacturing an alignment key of a semiconductor device is provided to easily control an overlay by changing a lattice pattern of the alignment key to a silicon-oxidation layer pattern to generate a difference of a reflection rate in an alignment key lattice when the alignment...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOON, MIN SIK, OH, SE YEONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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