Anti-condensation mechanism for piping joints of semiconductor facilities anti-condensation system

The present invention relates to a condensation preventing device for a piping joining part of a semiconductor equipment, and a condensation preventing system. According to an embodiment of the present invention, in the piping joining part of a semiconductor equipment piping consisting of a double p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM SEUNGGI, WOO DAEYEON
Format: Patent
Sprache:eng ; kor
Schlagworte:
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