ELECTRON MICROSCOPE BASED ON HEAT TRANSFER MODEL PREDICTION TECHNIQUE AND CONTROL METHOD THEREOF

An electron microscope according to one embodiment may include: an electronic lens block; a cooling unit installed at the electronic lens block, and having a conduit through which a refrigerant flows and a cooler cooling the refrigerant; a temperature sensor which measures the temperature of the ele...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JEONG JONG MAN, JIN GYU KIM, SANG CHUL LEE, CHEOLSU HAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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