ELECTRON MICROSCOPE BASED ON HEAT TRANSFER MODEL PREDICTION TECHNIQUE AND CONTROL METHOD THEREOF

ELECTRON MICROSCOPE BASED ON HEAT TRANSFER MODEL PREDICTION TECHNIQUE AND CONTROL METHOD THEREOF

An electron microscope according to one embodiment may include: an electronic lens block; a cooling unit installed at the electronic lens block, and having a conduit through which a refrigerant flows and a cooler cooling the refrigerant; a temperature sensor which measures the temperature of the ele...

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Hauptverfasser: JEONG JONG MAN, JIN GYU KIM, SANG CHUL LEE, CHEOLSU HAN
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Sprache:eng ; kor
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OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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creator JEONG JONG MAN
JIN GYU KIM
SANG CHUL LEE
CHEOLSU HAN
description An electron microscope according to one embodiment may include: an electronic lens block; a cooling unit installed at the electronic lens block, and having a conduit through which a refrigerant flows and a cooler cooling the refrigerant; a temperature sensor which measures the temperature of the electronic lens block; and a control unit which derives a first heat exchange transfer function based on a time delay characteristic between a current applied to the electronic lens block and the temperature measured at the temperature sensor, and adjusting a cooling amount of the cooling unit based on the current applied to the electronic lens block and the first heat exchange transfer function. 일 실시 예에 따른 전자 현미경은, 전자 렌즈 블록; 상기 전자 렌즈 블록에 설치되고 냉매가 유동하는 도관 및 상기 냉매를 냉각하는 냉각기를 구비하는 냉각부; 전자 렌즈 블록의 온도를 계측하는 온도 센서; 및 상기 전자 렌즈 블록에 인가되는 전류 및 상기 온도 센서에서 계측되는 온도 사이의 시간 지연 특성에 기초하여 제 1 열 교환 전달 함수를 도출하고, 상기 전자 렌즈 블록에 인가되는 전류 및 상기 제 1 열 교환 전달 함수에 기초하여 상기 냉각부의 냉각량을 조절하는 제어부를 포함할 수 있다.
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JIN GYU KIM ; SANG CHUL LEE ; CHEOLSU HAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR102088116BB13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2020</creationdate><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>JEONG JONG MAN</creatorcontrib><creatorcontrib>JIN GYU KIM</creatorcontrib><creatorcontrib>SANG CHUL LEE</creatorcontrib><creatorcontrib>CHEOLSU HAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JEONG JONG MAN</au><au>JIN GYU KIM</au><au>SANG CHUL LEE</au><au>CHEOLSU HAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ELECTRON MICROSCOPE BASED ON HEAT TRANSFER MODEL PREDICTION TECHNIQUE AND CONTROL METHOD THEREOF</title><date>2020-03-11</date><risdate>2020</risdate><abstract>An electron microscope according to one embodiment may include: an electronic lens block; a cooling unit installed at the electronic lens block, and having a conduit through which a refrigerant flows and a cooler cooling the refrigerant; a temperature sensor which measures the temperature of the electronic lens block; and a control unit which derives a first heat exchange transfer function based on a time delay characteristic between a current applied to the electronic lens block and the temperature measured at the temperature sensor, and adjusting a cooling amount of the cooling unit based on the current applied to the electronic lens block and the first heat exchange transfer function. 일 실시 예에 따른 전자 현미경은, 전자 렌즈 블록; 상기 전자 렌즈 블록에 설치되고 냉매가 유동하는 도관 및 상기 냉매를 냉각하는 냉각기를 구비하는 냉각부; 전자 렌즈 블록의 온도를 계측하는 온도 센서; 및 상기 전자 렌즈 블록에 인가되는 전류 및 상기 온도 센서에서 계측되는 온도 사이의 시간 지연 특성에 기초하여 제 1 열 교환 전달 함수를 도출하고, 상기 전자 렌즈 블록에 인가되는 전류 및 상기 제 1 열 교환 전달 함수에 기초하여 상기 냉각부의 냉각량을 조절하는 제어부를 포함할 수 있다.</abstract><oa>free_for_read</oa></addata></record>
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OPTICS
PHYSICS
title ELECTRON MICROSCOPE BASED ON HEAT TRANSFER MODEL PREDICTION TECHNIQUE AND CONTROL METHOD THEREOF
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