Thin-film coating apparatus and method for manufacturing solar cell using the same

Thin-film coating apparatus and method for manufacturing solar cell using the same

According to one aspect of the present invention, provided is a thin film coating apparatus. The thin film coating apparatus comprises: a support unit having a substrate seated on an upper surface thereof; a first coating unit disposed on top of the support unit to be movable in a vertical direction...

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Hauptverfasser: KIM DONG JEE, NHO SUNG HO, SEOK SANG IL, KANG DONG WOO
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator KIM DONG JEE
NHO SUNG HO
SEOK SANG IL
KANG DONG WOO
description According to one aspect of the present invention, provided is a thin film coating apparatus. The thin film coating apparatus comprises: a support unit having a substrate seated on an upper surface thereof; a first coating unit disposed on top of the support unit to be movable in a vertical direction to be close to or far from the substrate and applying a first coating material onto the substrate; and a second coating unit disposed to be adjacent to the first coating unit at top of the support unit and applying a second coating material onto the substrate. 본 발명의 일 측면에 따르면, 상면에 기판이 안착될 수 있는 지지부와, 상기 지지부의 상부에 배치되되 상기 기판에 근접하거나 멀어지도록 상하방향으로 운동할 수 있으며, 상기 기판 상에 제1 코팅물질을 도포하는 제1 코팅부와, 상기 지지부의 상부에 상기 제1 코팅부와 인접하도록 배치되며, 상기 기판 상에 제2 코팅물질을 도포하는 제2 코팅부를 구비하는, 박막 코팅 장치가 제공된다.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Thin-film coating apparatus and method for manufacturing solar cell using the same
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