APPARATUS FOR MANUFACTURING NOBLE GASES
The present invention provides an apparatus for manufacturing noble gases, which comprises: a compression part into which a first gas is introduced and which compressively supplies a first gas to a predetermined pressure range; a suction part introducing a first gas discharged from the compression p...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention provides an apparatus for manufacturing noble gases, which comprises: a compression part into which a first gas is introduced and which compressively supplies a first gas to a predetermined pressure range; a suction part introducing a first gas discharged from the compression part and discharging a halogen gas from the first gas and a second gas removed by an adsorption reaction; a low temperature part introducing the second gas discharged from the adsorption part and removing impurities contained in the second gas through adsorption; and a catalyst part removing hydrogen contained in the second gas discharged from the adsorption part by reaction with oxygen. The second gas is transferred to the low temperature part after passing through the catalyst part when the second gas passing through the adsorbing part contains hydrogen, and is transferred to the low temperature part when the second gas does not contain hydrogen.
본 발명은 제1 가스가 유입되고, 제1 가스를 소정압력 범위로 압축 공급하는 압축부; 압축부로부터 토출된 제1 가스가 유입되고, 제1 가스로부터 할로겐 가스 및 할로겐 화합물이 흡착 반응에 의해 제거된 제2 가스를 토출하는 흡착부; 흡착부로부터 토출된 제2 가스가 유입되어, 제2 가스에 포함된 불순물을 흡착을 통해 제거하기 위한 저온부; 및 흡착부로부터 토출된 제2 가스에 포함된 수소를 산소와의 반응에 의해 제거하기 위한 촉매부; 를 포함하며, 흡착부를 통과한 제2 가스가 수소를 포함하면, 촉매부를 통과 한 후 저온부로 이송하고, 제2 가스가 수소를 포함하지 않으면 저온부로 이송되도록 마련된 희가스 생산 장치를 제공하고자 한다. |
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