MANUFACTURING METHOD OF AN ELECTRODE LAYER FOR AN ELECTRON LENS MADE FOR AN MICRO COLUMN

The present invention relates to an electrode for manufacturing an electron lens of a micro-column device for generating an electron beam, and a method of manufacturing the same. The present invention makes it possible to manufacture an electrode of an electron lens by a damascene process and to mak...

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Bibliographische Detailangaben
Hauptverfasser:	AHN, SEUNG JUN, KIM, HO SEOB, KIM, DAE WOOK, KIM, HYUNG WOO, OH, TAE SIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The present invention relates to an electrode for manufacturing an electron lens of a micro-column device for generating an electron beam, and a method of manufacturing the same. The present invention makes it possible to manufacture an electrode of an electron lens by a damascene process and to make an electron lens having excellent optical characteristics. The method includes an exposure step, a photoresist pattern forming step, a seed layer forming step, a plating forming step, a planarization step, and a removing step. 본 발명은 전자빔을 생성하는 초소형 전자칼럼(micro-column)장치의 전자렌즈를 만들기 위한 전극 및 그 제조방법에 관한 것이다. 본 발명은 다마신 공정으로 전자렌즈의 전극을 제작하여 광학적 특성이 우수한 전자렌즈를 만들 수 있도록 하는 것이다.