SEMICONDUCTOR CHIP TESTING DEVICE

An apparatus to test a semiconductor chip is provided. The present invention comprises: an upper socket unit having an accommodation space to accommodate an upper semiconductor chip, holding a lower semiconductor chip using suction air flow passing around the upper semiconductor chip in the accommod...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HWANG, IN SEOL, CHOI, DUK SOON, PARK, SEONG HAN, KIM, DONG SHIN, KWON, IN SEOB, JEONG, WOO YOEL
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:An apparatus to test a semiconductor chip is provided. The present invention comprises: an upper socket unit having an accommodation space to accommodate an upper semiconductor chip, holding a lower semiconductor chip using suction air flow passing around the upper semiconductor chip in the accommodation unit and electrically connecting the lower semiconductor chip and the upper semiconductor chip; a blade block coupled with the upper socket unit to generate a suction air flow at the accommodation space; and a lower socket unit to mount the lower semiconductor chip held by the upper socket unit and electrically connected to the mounted lower semiconductor chip. 반도체 칩 검사장치에 대한 발명이 개시된다. 개시된 발명은: 상부 반도체 칩이 수용되는 수용공간이 내부에 형성되고, 수용공간에서 상부 반도체 칩의 주변을 통과하는 흡입기류를 이용하여 하부 반도체 칩을 파지하며, 하부 반도체 칩을 상부 반도체 칩과 전기적으로 연결시키는 상부소켓유닛과; 상부소켓유닛과 결합되어 수용공간에 흡입기류를 생성시키기 위한 진공압을 전달하는 블레이드블록; 및 상부소켓유닛에 파지된 하부 반도체 칩이 안착되고, 안착된 하부 반도체 칩과 전기적으로 연결되는 하부소켓유닛을 포함한다.