THERMAL TREATMENT APPARATUS

Provided is a heat treatment device capable of performing a heat treatment process for multiple large area substrates while preventing damage to a process tube due to the weight of a boat on which the large area substrates are loaded. The heat treatment device according to the present invention comp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, SEOK JIN, YANG, HEE CHUL, KIM, BONG CHEOL, DO, JIN YEONG, HWANG, JAE GUN, KIM, JONG HWAN, LEE, IN HA, JUNG, KI YOUNG, SEO, JIN U, JUNG, JONG YOUB, KIM, SUK JIN, KIM, JIN GAK, KANG, MIN HWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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