HEATING FURNACE, HEATING APPARATUS INCLUDING THE SAME AND FABRICATING METHOD OF ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE SAME

HEATING FURNACE, HEATING APPARATUS INCLUDING THE SAME AND FABRICATING METHOD OF ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE SAME

A heating furnace, a heating apparatus including the same, and a method for fabricating an organic light emitting display device using the same are provided to improve the management of a reliability of an organic electroluminescence device. A heating furnace(200) includes a heating unit(210), a vac...

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1. Verfasser: SON, JONG HOON
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Sprache:eng
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ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
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description A heating furnace, a heating apparatus including the same, and a method for fabricating an organic light emitting display device using the same are provided to improve the management of a reliability of an organic electroluminescence device. A heating furnace(200) includes a heating unit(210), a vacuum control unit(220), and a detection unit(230). The heating unit performs a heating process. The heating unit includes a process chamber(211), a manifold(212), and a heater(213). The process chamber has a substrate support for supporting a plurality of substrates. The manifold supports the process chamber. The heater provides the process chamber with heat to heat the substrates. The process chamber is made of quartz. The process chamber is partitioned by an internal tube(215) and an external tube(216). The internal tube has a cylindrical shape. The external tube has a sealed dome-shaped structure so as to block introduction of internal air and the external air.
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subjects ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
title HEATING FURNACE, HEATING APPARATUS INCLUDING THE SAME AND FABRICATING METHOD OF ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE SAME
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