TREATMENT METHOD FOR WASTE ORGANIC SOLVENT CONTAINING PHOTORESIST COMPONENT

TREATMENT METHOD FOR WASTE ORGANIC SOLVENT CONTAINING PHOTORESIST COMPONENT

A method for treating a waste organic solvent generated in a display fabricating process by a process that is capable of easily separating photoresist components from the waste organic solvent without a process trouble and increasing the recovery ratio of an organic solvent in a subsequent organic s...

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Hauptverfasser: JEONG, JIN BAE, MUN, JAE WOONG, LEE, SANG DAE
Format: Patent
Sprache:eng
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CHEMISTRY
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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creator JEONG, JIN BAE
MUN, JAE WOONG
LEE, SANG DAE
description A method for treating a waste organic solvent generated in a display fabricating process by a process that is capable of easily separating photoresist components from the waste organic solvent without a process trouble and increasing the recovery ratio of an organic solvent in a subsequent organic solvent regenerating process is provided. In a method for treating a waste organic solvent using double or multiple drum-type evaporation dryers having a gas exhaust port, a waste organic solvent injection port and a solid discharge port respectively formed in an upper part, an intermediate part and a lower part thereof, and cylinder type double or multiple heating drums(1) installed therein and rotated at a predetermined rotary speed, and scrapers(2) formed on respective surfaces of the double or multiple heating drums, the method comprises the steps of: (a) injecting a waste organic solvent containing photoresist components into the waste organic solvent injection port; (b) forming a waste organic solvent oil film on the surfaces of the double or multiple heating drums to evaporate an organic solvent; (c) removing photoresist components remained on the surfaces of the double or multiple heating drums by using the scrapers, and discharging the photoresist components through the solid discharge port; and (d) condensing the organic solvent evaporated in the step(b) to recover the organic solvent.
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subjects CHEMISTRY
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
title TREATMENT METHOD FOR WASTE ORGANIC SOLVENT CONTAINING PHOTORESIST COMPONENT
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