GRINDING TABLE

A glass substrate table is provided to stably form vacuum pressure even with simple constitution, thereby stably holding a substrate, by forming an inner structure of the glass substrate table in a Bernoulli type so as to generate vacuum adsorptive power. A glass substrate table is used to hold a gl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	PARK, DONG WON, LIM, SANG DUCK, LEE, GYU CHUL
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A glass substrate table is provided to stably form vacuum pressure even with simple constitution, thereby stably holding a substrate, by forming an inner structure of the glass substrate table in a Bernoulli type so as to generate vacuum adsorptive power. A glass substrate table is used to hold a glass substrate on an upper surface thereof. The glass substrate has small-sized lines(32) and large-sized lines(31) therein, wherein the small-sized lines and the large-sized lines are continually connected so as to vary the speed of air stream. Vacuum lines(33) are respectively joined to the small-sized lines or the large-sized lines, wherein each of the vacuum lines is connected to a vacuum groove(6) formed in a surface of the glass substrate table.