NONVOLATILE MEMORY DEVICE AND METHOD FOR FORMING THE SAME

Example embodiments may provide a nonvolatile memory device. The example embodiment nonvolatile memory device may include a floating gate structure formed on a semiconductor substrate with a gate insulating layer between them and/or a control gate formed adjacent to the floating gate with a tunnelin...

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Hauptverfasser: JEONG, YOUNG CHEON, HA, SOUNG YOUB, MOON, JUNG HO, PARK, JAE HYUN, KWON, CHUL SOON, LIM, BYEONG CHEOL, YU, JAE MIN
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creator JEONG, YOUNG CHEON
HA, SOUNG YOUB
MOON, JUNG HO
PARK, JAE HYUN
KWON, CHUL SOON
LIM, BYEONG CHEOL
YU, JAE MIN
description Example embodiments may provide a nonvolatile memory device. The example embodiment nonvolatile memory device may include a floating gate structure formed on a semiconductor substrate with a gate insulating layer between them and/or a control gate formed adjacent to the floating gate with a tunneling insulation layer between them. The floating gate may include a first floating gate formed on the gate insulating layer, a second floating gate formed on the first floating gate with a first insulating pattern between them, and/or a gate connecting layer formed on at least one sidewall of the first insulating pattern so that the gate conducting layer may electrically connect the first floating gate and the second floating gate. The second floating gate may have a tip formed at its longitudinal end that may not contact the gate connecting layer.
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title NONVOLATILE MEMORY DEVICE AND METHOD FOR FORMING THE SAME
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