CANISTER WITH CAPACITIVE LEVEL SENSOR FOR THE SPECIAL CHEMICAL
A chemicals storage container having a capacitive level sensor is provided to facilitate mechanical and electrical sealing of metal probe, to supply a chemicals storage container resistant to vacuum or high pressure, to allow precise measuring of precursor liquid level, and to improve accuracy of ca...
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| creator | SHIN, HYUN KOOCK |
| description | A chemicals storage container having a capacitive level sensor is provided to facilitate mechanical and electrical sealing of metal probe, to supply a chemicals storage container resistant to vacuum or high pressure, to allow precise measuring of precursor liquid level, and to improve accuracy of capacity measuring by stabilizing liquid surface of precursor. The chemicals storage container having the capacitive level sensor for easy sealing of metal probe and precise measuring of precursor liquid level includes: a case(11) where precursor is stored, a main body of container(10) including a cover(12) combined to the upper part of the case(11); an inlet pipe(20) injecting inactive gas into the container, which is connected to the cover(12); an outlet pipe(30) discharging injected inactive gas and evaporated precursors, which is connected to the cover(12); and a capacitive level sensor measuring liquid level of precursors inside the container through capacity difference between the first probe(60) and the second probe. |
| format | Patent |
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The chemicals storage container having the capacitive level sensor for easy sealing of metal probe and precise measuring of precursor liquid level includes: a case(11) where precursor is stored, a main body of container(10) including a cover(12) combined to the upper part of the case(11); an inlet pipe(20) injecting inactive gas into the container, which is connected to the cover(12); an outlet pipe(30) discharging injected inactive gas and evaporated precursors, which is connected to the cover(12); and a capacitive level sensor measuring liquid level of precursors inside the container through capacity difference between the first probe(60) and the second probe.</description><language>eng</language><subject>BABY COMFORTERS ; CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICALPURPOSES ; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY ; DEVICES FOR RECEIVING SPITTLE ; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGINGPHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL ORADMINISTERING FORMS ; HUMAN NECESSITIES ; HYGIENE ; MEDICAL OR VETERINARY SCIENCE</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20061114&DB=EPODOC&CC=KR&NR=100648301B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20061114&DB=EPODOC&CC=KR&NR=100648301B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHIN, HYUN KOOCK</creatorcontrib><title>CANISTER WITH CAPACITIVE LEVEL SENSOR FOR THE SPECIAL CHEMICAL</title><description>A chemicals storage container having a capacitive level sensor is provided to facilitate mechanical and electrical sealing of metal probe, to supply a chemicals storage container resistant to vacuum or high pressure, to allow precise measuring of precursor liquid level, and to improve accuracy of capacity measuring by stabilizing liquid surface of precursor. 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| language | eng |
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| subjects | BABY COMFORTERS CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICALPURPOSES DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY DEVICES FOR RECEIVING SPITTLE DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGINGPHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL ORADMINISTERING FORMS HUMAN NECESSITIES HYGIENE MEDICAL OR VETERINARY SCIENCE |
| title | CANISTER WITH CAPACITIVE LEVEL SENSOR FOR THE SPECIAL CHEMICAL |
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