SEMICONDUCTOR EQUIPMENT CONTROL SYSTEM

A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SIM, KYUNG BO, KIM, MYUNG KILL, JUNG, HYO SANG, JEON, TAE HA, WEON, JONG HWAN, CHUNG, JAE WOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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