SEMICONDUCTOR EQUIPMENT CONTROL SYSTEM

SEMICONDUCTOR EQUIPMENT CONTROL SYSTEM

A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values...

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Hauptverfasser: SIM, KYUNG BO, KIM, MYUNG KILL, JUNG, HYO SANG, JEON, TAE HA, WEON, JONG HWAN, CHUNG, JAE WOO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator SIM, KYUNG BO
KIM, MYUNG KILL
JUNG, HYO SANG
JEON, TAE HA
WEON, JONG HWAN
CHUNG, JAE WOO
description A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values stored in the semiconductor processing apparatus against verification data stored in the database. The results of the evaluation are used to determine whether a process will be performed by the semiconductor processing apparatus.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SEMICONDUCTOR EQUIPMENT CONTROL SYSTEM
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