SYSTEM FOR REFINING HIGHLY CONCENTRATED PHOSPHORIC ACID USING WASTE LIQUID FROM ETCHING PROCESS AND METHOD FOR REFINING THEREOF

SYSTEM FOR REFINING HIGHLY CONCENTRATED PHOSPHORIC ACID USING WASTE LIQUID FROM ETCHING PROCESS AND METHOD FOR REFINING THEREOF

PURPOSE: To provide a system for refining highly concentrated phosphoric acid from waste liquid from a manufacturing process of semiconductor or liquid crystalline display device and a method for refining thereof. CONSTITUTION: The system using waste liquid from etching process including 50-70 wt.%...

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Hauptverfasser: KWON, KEUN SUB, KANG, KYUNG HEE, KIM, SUNG HWA
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Sprache:eng ; kor
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CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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creator KWON, KEUN SUB
KANG, KYUNG HEE
KIM, SUNG HWA
description PURPOSE: To provide a system for refining highly concentrated phosphoric acid from waste liquid from a manufacturing process of semiconductor or liquid crystalline display device and a method for refining thereof. CONSTITUTION: The system using waste liquid from etching process including 50-70 wt.% of phosphoric acid, 10-30 wt.% of acetic acid, 5-10 wt.% of nitric acid and the remaining amount of water comprises a waste liquid storage part (101) which stores the waste liquid from etching process, a vacuum concentration reaction part (102) which condenses the waste liquid at the temperature of 90-118 deg.C under pressure of 300-700 mmHg to separate a lower layer of a highly concentrated phosphoric acid solution from an upper layer of a side product and a phosphoric acid solution storage part (105) which extracts the highly concentrated phosphoric acid solution from the vacuum concentration reaction part and then stores it.
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CONSTITUTION: The system using waste liquid from etching process including 50-70 wt.% of phosphoric acid, 10-30 wt.% of acetic acid, 5-10 wt.% of nitric acid and the remaining amount of water comprises a waste liquid storage part (101) which stores the waste liquid from etching process, a vacuum concentration reaction part (102) which condenses the waste liquid at the temperature of 90-118 deg.C under pressure of 300-700 mmHg to separate a lower layer of a highly concentrated phosphoric acid solution from an upper layer of a side product and a phosphoric acid solution storage part (105) which extracts the highly concentrated phosphoric acid solution from the vacuum concentration reaction part and then stores it.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
title SYSTEM FOR REFINING HIGHLY CONCENTRATED PHOSPHORIC ACID USING WASTE LIQUID FROM ETCHING PROCESS AND METHOD FOR REFINING THEREOF
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