WAFER SUPPORT AND TRANSFER APPARATUS
A wafer supporting and/or conveying apparatus includes at least one supporter having a plurality of recesses into which the edge of a wafer is inserted, for supporting the wafer inserted into the recesses at the lower portion of the wafer; a first connection rod for connecting the supporter to an ac...
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| creator | HAN, SEOK-BIN |
| description | A wafer supporting and/or conveying apparatus includes at least one supporter having a plurality of recesses into which the edge of a wafer is inserted, for supporting the wafer inserted into the recesses at the lower portion of the wafer; a first connection rod for connecting the supporter to an actuator; at least two holding rods having a plurality of recesses into which the edge of a wafer is inserted, for holding the wafer at the top of its both sides; and a second connection rod for connecting the holding rods to the actuator. A connecting board is set between the first connection rod and supporter, or between the second connection rod and supporter, thereby increasing stability in the apparatus. |
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A connecting board is set between the first connection rod and supporter, or between the second connection rod and supporter, thereby increasing stability in the apparatus.</description><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONVEYING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING THIN OR FILAMENTARY MATERIAL ; PACKING ; PERFORMING OPERATIONS ; PNEUMATIC TUBE CONVEYORS ; SEMICONDUCTOR DEVICES ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>1999</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19991015&DB=EPODOC&CC=KR&NR=100226489B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19991015&DB=EPODOC&CC=KR&NR=100226489B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HAN, SEOK-BIN</creatorcontrib><title>WAFER SUPPORT AND TRANSFER APPARATUS</title><description>A wafer supporting and/or conveying apparatus includes at least one supporter having a plurality of recesses into which the edge of a wafer is inserted, for supporting the wafer inserted into the recesses at the lower portion of the wafer; a first connection rod for connecting the supporter to an actuator; at least two holding rods having a plurality of recesses into which the edge of a wafer is inserted, for holding the wafer at the top of its both sides; and a second connection rod for connecting the holding rods to the actuator. A connecting board is set between the first connection rod and supporter, or between the second connection rod and supporter, thereby increasing stability in the apparatus.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONVEYING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>STORING</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1999</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAJd3RzDVIIDg0I8A8KUXD0c1EICXL0CwYJOgYEOAY5hoQG8zCwpiXmFKfyQmluBmU31xBnD93Ugvz41OKCxOTUvNSSeO8gQwMDIyMzEwtLJydDY-JUAQAbHiQq</recordid><startdate>19991015</startdate><enddate>19991015</enddate><creator>HAN, SEOK-BIN</creator><scope>EVB</scope></search><sort><creationdate>19991015</creationdate><title>WAFER SUPPORT AND TRANSFER APPARATUS</title><author>HAN, SEOK-BIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR100226489BB13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1999</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONVEYING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>STORING</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HAN, SEOK-BIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HAN, SEOK-BIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>WAFER SUPPORT AND TRANSFER APPARATUS</title><date>1999-10-15</date><risdate>1999</risdate><abstract>A wafer supporting and/or conveying apparatus includes at least one supporter having a plurality of recesses into which the edge of a wafer is inserted, for supporting the wafer inserted into the recesses at the lower portion of the wafer; a first connection rod for connecting the supporter to an actuator; at least two holding rods having a plurality of recesses into which the edge of a wafer is inserted, for holding the wafer at the top of its both sides; and a second connection rod for connecting the holding rods to the actuator. A connecting board is set between the first connection rod and supporter, or between the second connection rod and supporter, thereby increasing stability in the apparatus.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| language | eng |
| recordid | cdi_epo_espacenet_KR100226489BB1 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | WAFER SUPPORT AND TRANSFER APPARATUS |
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