TIN OXIDE THIN FILM SENSOR FOR DETECTING HYDROGEN GAS AND ITS METHOD

PROBLEM TO BE SOLVED: To improve the sensitivity to hydrogen by providing an insulating film existing on a semi-conductor substrate, a lower electrode existing on the insulating film, and a tin oxide thin film formed by an ion beam vapor deposition method. SOLUTION: An insulating film 102 preferably...

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Bibliographische Detailangaben
Hauptverfasser:	CHO, JOON-SIK, SONG, SUK-KYUN, CHOE, WON-KOOK, CHON, JIN-SUK, CHOE, DONG-SOO, YOON, YOUNG-SOO, KO, SUK-KEUN, JUNG, HYUNG-JIN
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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