LIFT SYSTEM OF WAFER TRANSFER APPARATUS

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Hauptverfasser:	LEE, KI-YEUN, YU, HAE-SAN, KIM, YONG-PYO, JI, JAE-POONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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creator	LEE, KI-YEUN YU, HAE-SAN KIM, YONG-PYO JI, JAE-POONG
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR0114988YY1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR0114988YY1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR0114988YY13</originalsourceid><addsrcrecordid>eNrjZFD38XQLUQiODA5x9VXwd1MId3RzDVIICXL0CwYxHAMCHIMcQ0KDeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvHeQgaGhiaWFRWSkoTExagD4-yR8</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>LIFT SYSTEM OF WAFER TRANSFER APPARATUS</title><source>esp@cenet</source><creator>LEE, KI-YEUN ; YU, HAE-SAN ; KIM, YONG-PYO ; JI, JAE-POONG</creator><creatorcontrib>LEE, KI-YEUN ; YU, HAE-SAN ; KIM, YONG-PYO ; JI, JAE-POONG</creatorcontrib><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>1998</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19980415&DB=EPODOC&CC=KR&NR=0114988Y1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19980415&DB=EPODOC&CC=KR&NR=0114988Y1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LEE, KI-YEUN</creatorcontrib><creatorcontrib>YU, HAE-SAN</creatorcontrib><creatorcontrib>KIM, YONG-PYO</creatorcontrib><creatorcontrib>JI, JAE-POONG</creatorcontrib><title>LIFT SYSTEM OF WAFER TRANSFER APPARATUS</title><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1998</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD38XQLUQiODA5x9VXwd1MId3RzDVIICXL0CwYxHAMCHIMcQ0KDeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvHeQgaGhiaWFRWSkoTExagD4-yR8</recordid><startdate>19980415</startdate><enddate>19980415</enddate><creator>LEE, KI-YEUN</creator><creator>YU, HAE-SAN</creator><creator>KIM, YONG-PYO</creator><creator>JI, JAE-POONG</creator><scope>EVB</scope></search><sort><creationdate>19980415</creationdate><title>LIFT SYSTEM OF WAFER TRANSFER APPARATUS</title><author>LEE, KI-YEUN ; YU, HAE-SAN ; KIM, YONG-PYO ; JI, JAE-POONG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR0114988YY13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1998</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>LEE, KI-YEUN</creatorcontrib><creatorcontrib>YU, HAE-SAN</creatorcontrib><creatorcontrib>KIM, YONG-PYO</creatorcontrib><creatorcontrib>JI, JAE-POONG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LEE, KI-YEUN</au><au>YU, HAE-SAN</au><au>KIM, YONG-PYO</au><au>JI, JAE-POONG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>LIFT SYSTEM OF WAFER TRANSFER APPARATUS</title><date>1998-04-15</date><risdate>1998</risdate><edition>6</edition><oa>free_for_read</oa></addata></record>
fulltext	fulltext_linktorsrc
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language	eng
recordid	cdi_epo_espacenet_KR0114988YY1
source	esp@cenet
subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
title	LIFT SYSTEM OF WAFER TRANSFER APPARATUS
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-15T13%3A36%3A31IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LEE,%20KI-YEUN&rft.date=1998-04-15&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EKR0114988YY1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true