SEMICONDUCTOR GAS FLOW DETECTING DEVICE

PURPOSE:To save the electric power when the device is driven intermittently by connecting an additional element for damping prevention to an element for substrate temperature measurement and an element for heat generation and shortening the startup time after a switch is turned on. CONSTITUTION:The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIROMIZU SHUNJI, SEKIMURA MASAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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