SEMICONDUCTOR GAS FLOW DETECTING DEVICE
PURPOSE:To save the electric power when the device is driven intermittently by connecting an additional element for damping prevention to an element for substrate temperature measurement and an element for heat generation and shortening the startup time after a switch is turned on. CONSTITUTION:The...
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| creator | SHIROMIZU SHUNJI SEKIMURA MASAYUKI |
| description | PURPOSE:To save the electric power when the device is driven intermittently by connecting an additional element for damping prevention to an element for substrate temperature measurement and an element for heat generation and shortening the startup time after a switch is turned on. CONSTITUTION:The heat generating element 6 and substrate temperature measuring element 7 are formed on the same semiconductor substrate 1. An operational amplifier 8 compares the detected voltage of said element with the detected value of a fluid temperature measuring element 2 and turns on and off the element 6 for heat generation according to the comparison result. The additional element for damping suppression which consists of a capacitor Cs, resistances Rr and Rop, etc., is connected to said substrate temperature measuring element and operational amplifier 8. Thus, this additional element is provided and then the element 6 for heat generation is prevented from damping thereafter because the substrate measuring element turns off at proper temperature before reaching set temperature. Consequently, the startup time from the switching-on operation to the stabilization of an output is shortened to save electric power. |
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CONSTITUTION:The heat generating element 6 and substrate temperature measuring element 7 are formed on the same semiconductor substrate 1. An operational amplifier 8 compares the detected voltage of said element with the detected value of a fluid temperature measuring element 2 and turns on and off the element 6 for heat generation according to the comparison result. The additional element for damping suppression which consists of a capacitor Cs, resistances Rr and Rop, etc., is connected to said substrate temperature measuring element and operational amplifier 8. Thus, this additional element is provided and then the element 6 for heat generation is prevented from damping thereafter because the substrate measuring element turns off at proper temperature before reaching set temperature. 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CONSTITUTION:The heat generating element 6 and substrate temperature measuring element 7 are formed on the same semiconductor substrate 1. An operational amplifier 8 compares the detected voltage of said element with the detected value of a fluid temperature measuring element 2 and turns on and off the element 6 for heat generation according to the comparison result. The additional element for damping suppression which consists of a capacitor Cs, resistances Rr and Rop, etc., is connected to said substrate temperature measuring element and operational amplifier 8. Thus, this additional element is provided and then the element 6 for heat generation is prevented from damping thereafter because the substrate measuring element turns off at proper temperature before reaching set temperature. 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CONSTITUTION:The heat generating element 6 and substrate temperature measuring element 7 are formed on the same semiconductor substrate 1. An operational amplifier 8 compares the detected voltage of said element with the detected value of a fluid temperature measuring element 2 and turns on and off the element 6 for heat generation according to the comparison result. The additional element for damping suppression which consists of a capacitor Cs, resistances Rr and Rop, etc., is connected to said substrate temperature measuring element and operational amplifier 8. Thus, this additional element is provided and then the element 6 for heat generation is prevented from damping thereafter because the substrate measuring element turns off at proper temperature before reaching set temperature. Consequently, the startup time from the switching-on operation to the stabilization of an output is shortened to save electric power.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING |
| title | SEMICONDUCTOR GAS FLOW DETECTING DEVICE |
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