INSPECTION DEVICE FOR SURFACE OF WAFER

PURPOSE:To increase the speed of feedback by composing the title inspection device of a long-sized light source for oblique projection light tying line focuses in the direction rectangular to the direction of carrying of a wafer surface, a projection lens, a long-sized receiving lens receiving only...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WAKANA SHINICHI, SUETAKE MIKIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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