SHIFTER FOR SEMICONDUCTOR WAFER

PURPOSE:To treat semiconductor wafers under ideal conditions, and to improve quality by providing a space changing means changing the spaces of a plurality of semiconductor wafers at the time of proceeding and the time of returning to a holding means of a semiconductor-wafer support means. CONSTITUT...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	SHIGEMATSU NOBUAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE:To treat semiconductor wafers under ideal conditions, and to improve quality by providing a space changing means changing the spaces of a plurality of semiconductor wafers at the time of proceeding and the time of returning to a holding means of a semiconductor-wafer support means. CONSTITUTION:When a plurality of semiconductor wafers are shifted between a first base section (a 'Teflon(R)' carrier) 28 and a second base section (a quartz carrier) 29, a lever 7 is turned, and the spaces of the wafers 30 are altered by a pitch changer 2 at the time of lifting and the time of lowering of a wafer supporter 1. Con sequently, a large number of the wafers 30 are varied to desired spaces at a stroke and can be shifted between the 'Teflon(R)' carrier 28 and the quartz carrier 29. Accordingly, the wafers 30 can be treated at spaces proper for CVD treatment, thus improving the quality of the wafers 30, then quickly shifting the wafers.