PRESSURE SWING ADSORBING APPARATUS

PURPOSE:To obtain aimed components to be recovered at high yield by providing a gas holder to the exhaust line of washing gas an adsorption tower, and connecting the outlet of the gas holder to the feed pipe of a material gas. CONSTITUTION:Washing gas is allowed to flow through a route of a pipe 8 for washing, an adsorption tower 3b, a pressure equalizing piping 10b, an adsorption tower 3c and a disposal pipe 4a of exhaust gas. In the final period of this washing process, when the concn. of the aimed components to be recovered in the disposal pipe 4 of the exhaust gas is high, a valve A2 is closed or slightly opened and a valve A4 is opened and the gas after washing is introduced into a gas holder 11 in a pressurized state. The gas stored in the gas holder 11 is sent to adsorption towers 3a-3c through a valve A3 in the stage of a final period of an absorbing process and the exhaust gas is returned to pretreatment towers 2a, 2b via the disposal pipe 4a of the exhaust gas.