CALIBRATION OF WAFER SURFACE INSPECTING DEVICE

PURPOSE:To contrive so as not to be confused an adhered foreign substance with intentional foreign substances provided on a calibration wafer and to make it possible to prevent the lowering of the calibration accuracy even though the foreign substance is adhered on the wafer by a method wherein an a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SUETAKE MIKIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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