SURFACE STRUCTURE ANALYZING DEVICE

PURPOSE:To allow the minor surface measurement performable on a laboratory scale by using an intensity-modulated incident electron beam. CONSTITUTION:An incident electron beam is radiated to a sample while its energy is changed, the quantity of Auger electrons emitted from the said sample is measured, the EXAFS vibration term superimposed on the resulting decay curve is Fourier-transformed, thereby the crystal structure of the fine surface of the said sample is analyzed. In this device, the incident electron beam is particularly intensity-modulated. Electrons radiated on a solid sample are intensity-modulated at the frequency omegao, on the other hand the energy distribution of Auger electrons not intensity-modulated is I(E) (the number of Auger electrons having the kinetic energy of E), then the energy distribution of the Auger electrons emitted from the sample by the radiation of the electrons intensity-modulated at the frequency omegao is indicated as I(E) sinomegaot. Therefore, if only the signal component of the frequency omegao is detected by a lock-in amplifier, the true spectrum I(E) can be obtained. That is, according to this method, the distortion by potential modulation is not generated, end only the omegao component is detected, thus the noise component of thermoelectrons or the like is reduced.