EVAPORATOR

PURPOSE:To form a uniform thin film of high quality even on a large-sized substrate by providing a plurality of crucibles and moving the substrate while irradiating the substrate of the whole width with a beam. CONSTITUTION:A distance between a sealed crucible 2 and a substrate is so set that the be...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NAKABACHI YOSHIKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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