JPS6258484B

PURPOSE:To form an accurate edge although the edge of an irradiation pattern cross obliquely the deflected scanning direction, by turning an intermediate slit so that an image of the intermediate slit edge formed by an objective lens is in contact with the edge of the pattern to be formed. CONSTITUT...

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Bibliographische Detailangaben

Hauptverfasser:	YAMAGUCHI HIROSHI, MYAUCHI TAKEOKI, MITANI MASAO
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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