APPARATUS FOR MANUFACTURE OF THIN FILM

PURPOSE:To prevent a product thin film from forming without an ultraviolet light transmission window by applying a bias voltage of a direction for separating ion species that the product becomes solid from the window between a first electrode and a second electrode provided on the window. CONSTITUTI...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	URATA KAZUO, TASHIRO MAMORU, YAMAZAKI SHUNPEI, MISEMURA YUUJI, OTAKA MASAICHI, ITO KENJI, IMATO SHINJI, HAMAYA TOSHIJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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